With its innovative 1 MHz Ultrasonic Micro Cleaning (UMC) module generator, Weber Ultrasonics has created the ideal conditions for efficient and reproducible cleanliness in microtechnical and nanotechnical production. The 250 and 500 Watt power classes allow the new megasonic device to adapt to individual cleaning requirements. Innovative high-tech components make it possible to achieve maximum performance while demanding a minimum of space: up to six UMC modules can be integrated in a 19" housing. As a result, cleaning systems with a power output of up to 3000 Watt can be put in a single housing, while at the same time sophisticated features guarantee a high level of process safety and reliability. Mega ultrasonic output in the smallest of spaces Photovoltaics, semiconductor technology, precision and micro optics, medical technology, the LIGA process, microsystems and nanotechnology – these areas all demand maximum cleanliness due to their highly sensitive surfaces and finely structured components. Megasonic cleaning is among the most popular cleaning procedures, as the finest nanoscaled-sized particles and film-like dirt can be removed from surfaces non-destructively and without residue just like from troughs within microstructures. Weber Ultrasonics GmbH, one of the world’s leading manufacturers of ultrasonic components for surface technology, has developed innovative megasonic generators with 250 and 500 Watt power output in 19" technology and transducer systems for this area of application. The Karlsbad-based company’s new UMC generation excels through its outstanding efficiency and reliability as well as an extremely compact design.
The innovative 1 MHz Ultrasonic Micro Cleaning (UMC) module generator offers ideal conditions for efficient and reproducible cleanliness in microtechnical and nanotechnical production. Innovative high-tech components make it possible to achieve maximum performance while demanding a minimum of space. High efficiency – reliable and gentle cleaning The new UMC generators from Weber Ultrasonics boast maximum stability of all process-relevant parameters thanks to the latest control technology. This in turn leads to optimum coordination between generators and accompanying transducers, ensuring a transmission of energy with virtually no loss. The resulting high degree of efficiency of the UMC cleaning system allows absolutely reliable, reproducible and yet gentle removal of contamination. A further advantage is that the generator can be used in combination with every compatible transducer of the same power class without the need for time-consuming adjustment procedures. The power output can be set steplessly between 10% and 100% via power control, and the UMC generators can be operated manually on the equipment itself, via remote control or from a PC. Features for greater safety and reliability come as standard Like all ultrasonic generators from Weber Ultrasonics, the new 1 MHz devices also have a range of features at their disposal for increasing both process and operational safety, including protective functions against short-circuiting, no-load operation and excess temperature. Self-monitoring and transducer monitoring are also integrated, ensuring that the system can only be started if the transducer is functioning. The corresponding error signals are available for process monitoring purposes. Customised high performance transducer systems The Sonosub submersible transducer system and Sonoplate plate transducer system from Weber Ultrasonics with 500 and 250 Watt power output are the perfect companions to the 1 MHz and 500 kHz generators. The size of the high performance transducers can be adapted according to customer wishes or the object to be cleaned, such as wafers, thereby increasing the efficiency of the cleaning systems even further. Weber Ultrasonics GmbH Sabine Fragosa Im Hinteracker 7 76307 Karlsbad-Ittersbach / Germany Tel. +49 (0)7248 9207-0 [email protected] www.weber-ultrasonics.de
